au.\*:("AKARI, K")
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Reduction macroparticles during the deposition of TiN films prepared by arc ion platingAKARI, K; TAMAGAKI, H; KUMAKIRI, T et al.Surface & coatings technology. 1990, Vol 43-44, Num 1-3, pp 312-323, issn 0257-8972, 12 p.Conference Paper